Last Update: 28/Apr/2012

gSurface Nitridation of Metals by Nitrogen Plasmas - Dependence on Various Plasma Parametersh

@-@ H. Kobori, S. Koike, S. Watanabe, M. Matsuzaki, H. Matsuura and H. Akatsuka,
Dependence of Nitriding Degree of Ti Surface by Non-LTE Nitrogen Plasma on Various Plasma Parameters,
Thin Solid Films, Vol. 457, pp. 69, 2004.